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Highly Sensitive Capacitive MEMS for Photoacoustic Gas Trace Detection

An enhanced MEMS capacitive sensor is developed for photoacoustic gas detection. This work attempts to address the lack of the literature regarding integrated and compact silicon-based photoacoustic gas sensors. The proposed mechanical resonator combines the advantages of silicon technology used in...

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Detalles Bibliográficos
Autores principales:	Seoudi, Tarek, Charensol, Julien, Trzpil, Wioletta, Pages, Fanny, Ayache, Diba, Rousseau, Roman, Vicet, Aurore, Bahriz, Michael
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10057328/ https://www.ncbi.nlm.nih.gov/pubmed/36991990 http://dx.doi.org/10.3390/s23063280

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