The Effect of Defect Charge and Parasitic Surface Conductance on Aluminum Nitride RF Filter Circuit Loss

When AlN thin films are deposited directly on the high-resistance silicon (HR-Si) substrate, a conductive layer will be formed on the HR-Si surface. This phenomenon is called the parasitic surface conduction (PSC) effect. The presence of the PSC effect will increase the power consumption of electron...

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Detalles Bibliográficos
Autores principales: Xu, Tian, Zou, Yali, Huang, Xuan, Wu, Junmin, Wu, Shihao, Liu, Yuhao, Xu, Xuankai, Liu, Fengyu
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10058060/
https://www.ncbi.nlm.nih.gov/pubmed/36984989
http://dx.doi.org/10.3390/mi14030583

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10058060/
https://www.ncbi.nlm.nih.gov/pubmed/36984989
http://dx.doi.org/10.3390/mi14030583

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