Characterization of the Response of Magnetron Sputtered In(2)O(3−x) Sensors to NO(2)

The response of resistive In(2)O(3−x) sensing devices was investigated as a function of the NO(2) concentration in different operative conditions. Sensing layers are 150 nm thick films manufactured by oxygen-free room temperature magnetron sputtering deposition. This technique allows for a facile an...

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Detalles Bibliográficos
Autores principales: Panzardi, Enza, Calisi, Nicola, Enea, Nicoleta, Fort, Ada, Mugnaini, Marco, Vignoli, Valerio, Vinattieri, Anna, Bruzzi, Mara
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10058676/
https://www.ncbi.nlm.nih.gov/pubmed/36991976
http://dx.doi.org/10.3390/s23063265

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10058676/
https://www.ncbi.nlm.nih.gov/pubmed/36991976
http://dx.doi.org/10.3390/s23063265

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