Cargando…
Characterization of the Response of Magnetron Sputtered In(2)O(3−x) Sensors to NO(2)
The response of resistive In(2)O(3−x) sensing devices was investigated as a function of the NO(2) concentration in different operative conditions. Sensing layers are 150 nm thick films manufactured by oxygen-free room temperature magnetron sputtering deposition. This technique allows for a facile an...
| Autores principales: | , , , , , , , |
|---|---|
| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2023
|
| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10058676/ https://www.ncbi.nlm.nih.gov/pubmed/36991976 http://dx.doi.org/10.3390/s23063265 |