Thermodynamical Analysis of the Formation of α-Si Ring Structures on Silicon Surface

Superficial modifications on silicon wafers produced by single-shot focused femtosecond laser irradiation having a 1030 nm wavelength and 300 fs pulse duration were experimentally and theoretically analyzed. The laser fluence window when the amorphous silicon phase develops, resulting in a ring-like...

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Detalles Bibliográficos
Autores principales: Jarutis, Vygandas, Paipulas, Domas, Jukna, Vytautas
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10058774/
https://www.ncbi.nlm.nih.gov/pubmed/36984084
http://dx.doi.org/10.3390/ma16062205

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10058774/
https://www.ncbi.nlm.nih.gov/pubmed/36984084
http://dx.doi.org/10.3390/ma16062205

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