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Thermodynamical Analysis of the Formation of α-Si Ring Structures on Silicon Surface
Superficial modifications on silicon wafers produced by single-shot focused femtosecond laser irradiation having a 1030 nm wavelength and 300 fs pulse duration were experimentally and theoretically analyzed. The laser fluence window when the amorphous silicon phase develops, resulting in a ring-like...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10058774/ https://www.ncbi.nlm.nih.gov/pubmed/36984084 http://dx.doi.org/10.3390/ma16062205 |