Detection of In-Plane Movement in Electrically Actuated Microelectromechanical Systems Using a Scanning Electron Microscope

The measurement of in-plane motion in microelectromechanical systems (MEMS) is a challenge for existing measurement techniques due to the small size of the moving devices and the low amplitude of motion. This paper studied the possibility of using images obtained using a scanning electron microscope...

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Detalles Bibliográficos
Autores principales: Nieminen, Tarmo, Tiwary, Nikhilendu, Ross, Glenn, Paulasto-Kröckel, Mervi
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10059254/
https://www.ncbi.nlm.nih.gov/pubmed/36985105
http://dx.doi.org/10.3390/mi14030698

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10059254/
https://www.ncbi.nlm.nih.gov/pubmed/36985105
http://dx.doi.org/10.3390/mi14030698

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