Post-Processing Trimming of Silicon Photonic Devices Using Femtosecond Laser

Fabrication errors inevitably occur in device manufacturing owing to the limited processing accuracy of commercial silicon photonic processes. For silicon photonic devices, which are mostly processing-sensitive, their performances usually deteriorate significantly. This remains an unsolved issue for...

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Detalles Bibliográficos
Autores principales: Wu, Yating, Shang, Hongpeng, Zheng, Xiaorui, Chu, Tao
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10059263/
https://www.ncbi.nlm.nih.gov/pubmed/36985925
http://dx.doi.org/10.3390/nano13061031

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10059263/
https://www.ncbi.nlm.nih.gov/pubmed/36985925
http://dx.doi.org/10.3390/nano13061031

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