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Post-Processing Trimming of Silicon Photonic Devices Using Femtosecond Laser
Fabrication errors inevitably occur in device manufacturing owing to the limited processing accuracy of commercial silicon photonic processes. For silicon photonic devices, which are mostly processing-sensitive, their performances usually deteriorate significantly. This remains an unsolved issue for...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10059263/ https://www.ncbi.nlm.nih.gov/pubmed/36985925 http://dx.doi.org/10.3390/nano13061031 |