Femtosecond laser-assisted fabrication of piezoelectrically actuated crystalline quartz-based MEMS resonators

A novel technology for the precise fabrication of quartz resonators for MEMS applications is introduced. This approach is based on the laser-induced chemical etching of quartz. The main processing steps include femtosecond UV laser treatment of a Cr-Au-coated Z-cut alpha quartz wafer, followed by we...

Descripción completa

Detalles Bibliográficos
Autores principales: Linden, John, Melech, Neta, Sakaev, Igor, Fogel, Ofer, Krylov, Slava, Nuttman, David, Zalevsky, Zeev, Sirota, Marina
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10060424/
https://www.ncbi.nlm.nih.gov/pubmed/37007607
http://dx.doi.org/10.1038/s41378-023-00511-5

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10060424/
https://www.ncbi.nlm.nih.gov/pubmed/37007607
http://dx.doi.org/10.1038/s41378-023-00511-5

Ejemplares similares