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Femtosecond laser-assisted fabrication of piezoelectrically actuated crystalline quartz-based MEMS resonators
A novel technology for the precise fabrication of quartz resonators for MEMS applications is introduced. This approach is based on the laser-induced chemical etching of quartz. The main processing steps include femtosecond UV laser treatment of a Cr-Au-coated Z-cut alpha quartz wafer, followed by we...
| Autores principales: | , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10060424/ https://www.ncbi.nlm.nih.gov/pubmed/37007607 http://dx.doi.org/10.1038/s41378-023-00511-5 |