Charge-optimized many-body interaction potential for AlN revisited to explore plasma–surface interactions

Plasma–surface interactions during AlN thin film sputter deposition could be studied by means of reactive molecular dynamics (RMD) methods. This requires an interaction potential that describes all species as well as wall interactions (e.g., particle emission, damage formation) appropriately. Howeve...

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Detalles Bibliográficos
Autores principales: Gergs, Tobias, Mussenbrock, Thomas, Trieschmann, Jan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10066324/
https://www.ncbi.nlm.nih.gov/pubmed/37002255
http://dx.doi.org/10.1038/s41598-023-31862-8

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10066324/
https://www.ncbi.nlm.nih.gov/pubmed/37002255
http://dx.doi.org/10.1038/s41598-023-31862-8

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