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Charge-optimized many-body interaction potential for AlN revisited to explore plasma–surface interactions
Plasma–surface interactions during AlN thin film sputter deposition could be studied by means of reactive molecular dynamics (RMD) methods. This requires an interaction potential that describes all species as well as wall interactions (e.g., particle emission, damage formation) appropriately. Howeve...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10066324/ https://www.ncbi.nlm.nih.gov/pubmed/37002255 http://dx.doi.org/10.1038/s41598-023-31862-8 |