Exploring the nonlinear piezoresistive effect of 4H-SiC and developing MEMS pressure sensors for extreme environments

Microelectromechanical system (MEMS) pressure sensors based on silicon are widely used and offer the benefits of miniaturization and high precision. However, they cannot easily withstand high temperatures exceeding 150 °C because of intrinsic material limits. Herein, we proposed and executed a syste...

Descripción completa

Detalles Bibliográficos
Autores principales: Wu, Chen, Fang, Xudong, Kang, Qiang, Fang, Ziyan, Wu, Junxia, He, Hongtao, Zhang, Dong, Zhao, Libo, Tian, Bian, Maeda, Ryutaro, Jiang, Zhuangde
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10070454/
https://www.ncbi.nlm.nih.gov/pubmed/37025565
http://dx.doi.org/10.1038/s41378-023-00496-1

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10070454/
https://www.ncbi.nlm.nih.gov/pubmed/37025565
http://dx.doi.org/10.1038/s41378-023-00496-1

Ejemplares similares