Experimental Formation and Mechanism Study for Super-High Dielectric Constant AlO(x)/TiO(y) Nanolaminates

Super-high dielectric constant (k) AlO(x)/TiO(y) nanolaminates (ATO NLs) are deposited by an atomic layer deposition technique for application in next-generation electronics. Individual multilayers with uniform thicknesses are formed for the ATO NLs. With an increase in AlO(x) content in each ATO su...

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Detalles Bibliográficos
Autores principales: Liu, Jiangwei, Okamura, Masayuki, Mashiko, Hisanori, Imura, Masataka, Liao, Meiyong, Kikuchi, Ryosuke, Suzuka, Michio, Koide, Yasuo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10096684/
https://www.ncbi.nlm.nih.gov/pubmed/37049349
http://dx.doi.org/10.3390/nano13071256

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10096684/
https://www.ncbi.nlm.nih.gov/pubmed/37049349
http://dx.doi.org/10.3390/nano13071256

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