Nanoscale temperature sensing of electronic devices with calibrated scanning thermal microscopy

Heat dissipation threatens the performance and lifetime of many electronic devices. As the size of devices shrinks to the nanoscale, we require spatially and thermally resolved thermometry to observe their fine thermal features. Scanning thermal microscopy (SThM) has proven to be a versatile measure...

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Detalles Bibliográficos
Autores principales: Swoboda, Timm, Wainstein, Nicolás, Deshmukh, Sanchit, Köroğlu, Çağıl, Gao, Xing, Lanza, Mario, Hilgenkamp, Hans, Pop, Eric, Yalon, Eilam, Muñoz Rojo, Miguel
Formato: Online Artículo Texto
Lenguaje:English
Publicado: The Royal Society of Chemistry 2023
Materias:
Chemistry
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10099078/
https://www.ncbi.nlm.nih.gov/pubmed/37006192
http://dx.doi.org/10.1039/d3nr00343d

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10099078/
https://www.ncbi.nlm.nih.gov/pubmed/37006192
http://dx.doi.org/10.1039/d3nr00343d

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