A tabletop X-ray tomography instrument for nanometer-scale imaging: reconstructions

We show three-dimensional reconstructions of a region of an integrated circuit from a 130 nm copper process. The reconstructions employ x-ray computed tomography, measured with a new and innovative high-magnification x-ray microscope. The instrument uses a focused electron beam to generate x-rays in...

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Detalles Bibliográficos
Autores principales: Levine, Zachary H., Alpert, Bradley K., Dagel, Amber L., Fowler, Joseph W., Jimenez, Edward S., Nakamura, Nathan, Swetz, Daniel S., Szypryt, Paul, Thompson, Kyle R., Ullom, Joel N.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10101988/
https://www.ncbi.nlm.nih.gov/pubmed/37064166
http://dx.doi.org/10.1038/s41378-023-00510-6

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10101988/
https://www.ncbi.nlm.nih.gov/pubmed/37064166
http://dx.doi.org/10.1038/s41378-023-00510-6

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