Cargando…
A tabletop X-ray tomography instrument for nanometer-scale imaging: reconstructions
We show three-dimensional reconstructions of a region of an integrated circuit from a 130 nm copper process. The reconstructions employ x-ray computed tomography, measured with a new and innovative high-magnification x-ray microscope. The instrument uses a focused electron beam to generate x-rays in...
Autores principales: | Levine, Zachary H., Alpert, Bradley K., Dagel, Amber L., Fowler, Joseph W., Jimenez, Edward S., Nakamura, Nathan, Swetz, Daniel S., Szypryt, Paul, Thompson, Kyle R., Ullom, Joel N. |
---|---|
Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2023
|
Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10101988/ https://www.ncbi.nlm.nih.gov/pubmed/37064166 http://dx.doi.org/10.1038/s41378-023-00510-6 |
Ejemplares similares
-
Enhancing Tabletop X-Ray Phase Contrast Imaging with Nano-Fabrication
por: Miao, Houxun, et al.
Publicado: (2015) -
Applications and Physics of the Tabletop Storage Ring
por: Yamada, H, et al.
Publicado: (1999) -
Quantum sensors from the tabletop to the Universe
por: Ellis, Jonathan R.
Publicado: (2021) -
Coherent Tabletop EUV Ptychography of Nanopatterns
por: Truong, Nguyen Xuan, et al.
Publicado: (2018) -
Tabletop game design for video game designers
por: Ham, Ethan
Publicado: (2016)