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Effect of Nitrogen Partial Pressure on Structure, Mechanical Property, and Corrosion Behavior of ZrN(x) Films Prepared by Reactive DC Magnetron Sputtering
ZrN(x) films were deposited by DC magnetron sputtering with pure Zr target in different nitrogen partial pressure atmospheres (r = N(2)/[Ar + N(2)]). The structure and composition of the thin films were characterized as a function of r using scanning electron microscope, glancing angle X-ray diffrac...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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Hindawi
2023
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10110377/ https://www.ncbi.nlm.nih.gov/pubmed/37077222 http://dx.doi.org/10.1155/2023/3604077 |