Ion-beam assisted sputtering of titanium nitride thin films

Titanium nitride is a material of interest for many superconducting devices such as nanowire microwave resonators and photon detectors. Thus, controlling the growth of TiN thin films with desirable properties is of high importance. This work aims to explore effects in ion beam-assisted sputtering (I...

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Detalles Bibliográficos
Autores principales: Draher, Timothy, Polakovic, Tomas, Li, Juliang, Li, Yi, Welp, Ulrich, Jiang, Jidong Samuel, Pearson, John, Armstrong, Whitney, Meziani, Zein-Eddine, Chang, Clarence, Kwok, Wai-Kwong, Xiao, Zhili, Novosad, Valentine
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10113206/
https://www.ncbi.nlm.nih.gov/pubmed/37072413
http://dx.doi.org/10.1038/s41598-023-31549-0

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10113206/
https://www.ncbi.nlm.nih.gov/pubmed/37072413
http://dx.doi.org/10.1038/s41598-023-31549-0

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