Cargando…

Ion-beam assisted sputtering of titanium nitride thin films

Titanium nitride is a material of interest for many superconducting devices such as nanowire microwave resonators and photon detectors. Thus, controlling the growth of TiN thin films with desirable properties is of high importance. This work aims to explore effects in ion beam-assisted sputtering (I...

Descripción completa

Detalles Bibliográficos
Autores principales:	Draher, Timothy, Polakovic, Tomas, Li, Juliang, Li, Yi, Welp, Ulrich, Jiang, Jidong Samuel, Pearson, John, Armstrong, Whitney, Meziani, Zein-Eddine, Chang, Clarence, Kwok, Wai-Kwong, Xiao, Zhili, Novosad, Valentine
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Nature Publishing Group UK 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10113206/ https://www.ncbi.nlm.nih.gov/pubmed/37072413 http://dx.doi.org/10.1038/s41598-023-31549-0

Ejemplares similares

Unconventional Applications of Superconducting Nanowire Single Photon Detectors
por: Polakovic, Tomas, et al.
Publicado: (2020)

Highly Plasmonic Titanium Nitride by Room-Temperature Sputtering
por: Chang, Chun-Chieh, et al.
Publicado: (2019)

Low Temperature Reactive Sputtering of Thin Aluminum Nitride Films on Metallic Nanocomposites
por: Ramadan, Khaled Sayed Elbadawi, et al.
Publicado: (2015)

Composition and properties of RF-sputter deposited titanium dioxide thin films
por: Daughtry, Jesse, et al.
Publicado: (2020)

Reactive Sputtering of Aluminum Nitride (002) Thin Films for Piezoelectric Applications: A Review
por: Iqbal, Abid, et al.
Publicado: (2018)

Microstructural evolution of tantalum nitride thin films synthesized by inductively coupled plasma sputtering
por: Baik, Sung-Il, et al.
Publicado: (2020)

Two-Functional Direct Current Sputtered Silver-Containing Titanium Dioxide Thin Films
por: Musil, J, et al.
Publicado: (2009)

Effect of Microstructural and Tribological Behaviors of Sputtered Titanium Carbide Thin Film on Copper Substrate
por: Ogunlana, Musibau Olalekan, et al.
Publicado: (2022)

Annealing Effect on the Structural and Optical Properties of Sputter-Grown Bismuth Titanium Oxide Thin Films
por: Alfonso, José E., et al.
Publicado: (2014)

Broadband Absorption Based on Thin Refractory Titanium Nitride Patterned Film Metasurface
por: Huo, Dewang, et al.
Publicado: (2021)

Optimal Growth Conditions for Forming c-Axis (002) Aluminum Nitride Thin Films as a Buffer Layer for Hexagonal Gallium Nitride Thin Films Produced with In Situ Continual Radio Frequency Sputtering
por: Liu, Wei-Sheng, et al.
Publicado: (2022)

Structural, Compositional, and Plasmonic Characteristics of Ti–Zr Ternary Nitride Thin Films Tuned by the Nitrogen Flow Ratio in Magnetron Sputtering
por: Chen, Lianlian, et al.
Publicado: (2020)

The Effect of Nitridation on Sputtering AlN on Composited Patterned Sapphire Substrate
por: Zhang, Yi, et al.
Publicado: (2023)

Thickness Influence on In Vitro Biocompatibility of Titanium Nitride Thin Films Synthesized by Pulsed Laser Deposition
por: Duta, Liviu, et al.
Publicado: (2016)

The pumping speed of titanium sputter pumps in ultrahigh vacuum
por: Fischer, E
Publicado: (1963)

Vacuum technology, thin films and sputtering: an introduction
por: Stuart, R V
Publicado: (1983)

The Effect of Sputtering Parameters and Doping of Copper on Surface Free Energy and Magnetic Properties of Iron and Iron Nitride Nano Thin Films on Polymer Substrate
por: Khan, Waheed, et al.
Publicado: (2017)

Titanium Nitride Thin Film Based Low-Redox-Interference Potentiometric pH Sensing Electrodes
por: Paul Shylendra, Shimrith, et al.
Publicado: (2020)

Deposited ultra-thin titanium nitride nanorod array as a plasmonic near-perfect light absorber
por: Jen, Yi-Jun, et al.
Publicado: (2020)

Impact of Deposition Power and Gas Flow Ratio on the Tribological Properties of Titanium Vanadium Nitride Thin Films
por: Chauhan, Kamlesh V., et al.
Publicado: (2023)

Preparation of Copper Nitride Films with Superior Photocatalytic Activity through Magnetron Sputtering
por: Jiang, Aihua, et al.
Publicado: (2020)

Electrical Properties of Aluminum Nitride Thick Films Magnetron Sputtered on Aluminum Substrates
por: Desideri, Daniele, et al.
Publicado: (2022)

Oxygen Partial Pressure Impact on Characteristics of Indium Titanium Zinc Oxide Thin Film Transistor Fabricated via RF Sputtering
por: Hsu, Ming-Hung, et al.
Publicado: (2017)

Molecular titanium nitrides: nucleophiles unleashed
por: Grant, Lauren N., et al.
Publicado: (2017)

In situ and real-time monitoring of structure formation during non-reactive sputter deposition of lanthanum and reactive sputter deposition of lanthanum nitride
por: Krause, Bärbel, et al.
Publicado: (2018)

The pumping speed of titanium sputter pumps in ultra-high vacuum
por: Pischer, E
Publicado: (1963)

Magnetic Phases of Sputter Deposited Thin-Film Erbium
por: Witt, J. D. S., et al.
Publicado: (2016)

Fabrication of black aluminium thin films by magnetron sputtering
por: More-Chevalier, J., et al.
Publicado: (2020)

2nd International Workshop on the Structure of the Nucleon at Large Bjorken x
por: Bourrely, Claude, et al.
Publicado: (2005)

Magneto-Transport Properties of Co–Cu Thin Films Obtained by Co-Sputtering and Sputter Gas Aggregation
por: López Antón, Ricardo, et al.
Publicado: (2021)

Polyether Ether Ketone Coated with Ultra-Thin Films of Titanium Oxide and Zirconium Oxide Fabricated by DC Magnetron Sputtering for Biomedical Application
por: Akimchenko, Igor O., et al.
Publicado: (2022)

Composition-dependent photoconductivities in indium aluminium nitride nanorods grown by magnetron sputter epitaxy
por: Bangolla, Hemanth Kumar, et al.
Publicado: (2022)

Nitriding Phenomena in Titanium and the 6Al-4V Titanium Alloy
por: Cuthill, J. R., et al.
Publicado: (1960)

Sputter Deposition of Titanium on Poly(Methyl Methacrylate) Enhances Corneal Biocompatibility
por: Sharifi, Sina, et al.
Publicado: (2020)

Optical Properties and Plasmonic Performance of Titanium Nitride
por: Patsalas, Panos, et al.
Publicado: (2015)

High-harmonic generation in metallic titanium nitride
por: Korobenko, A., et al.
Publicado: (2021)

Formation of nanostructured metallic glass thin films upon sputtering
por: Ketov, Sergey V., et al.
Publicado: (2017)

Modeling of metastable phase formation diagrams for sputtered thin films
por: Chang, Keke, et al.
Publicado: (2016)

Perovskite Thin Film Synthesised from Sputtered Lead Sulphide
por: Silva Filho, José Maria Clemente da, et al.
Publicado: (2018)

Sputtered Modified Barium Titanate for Thin-Film Capacitor Applications
por: Reynolds, Glyn J., et al.
Publicado: (2012)

Cannot write session to /tmp/vufind_sessions/sess_9jsd7tbsad7ignrailq7p3b2su