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A miniaturized transit-time ultrasonic flowmeter based on ScAlN piezoelectric micromachined ultrasonic transducers for small-diameter applications

Transit-time ultrasonic flowmeters (TTUFs) are among the most widely used devices for flow measurements. However, traditional TTUFs are usually based on a bulk piezoelectric transducer, which limits their application in small-diameter channels. In this paper, we developed a miniaturized TTUF based o...

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Detalles Bibliográficos
Autores principales: Gao, Yunfei, Chen, Minkan, Wu, Zhipeng, Yao, Lei, Tong, Zhihao, Zhang, Songsong, Gu, Yuandong Alex, Lou, Liang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10113259/
https://www.ncbi.nlm.nih.gov/pubmed/37091826
http://dx.doi.org/10.1038/s41378-023-00518-y