Highly sensitive low-frequency-detectable acoustic sensor using a piezoresistive cantilever for health monitoring applications

This study investigates a cantilever-based pressure sensor that can achieve a resolution of approximately 0.2 mPa, over the frequency range of 0.1–250 Hz. A piezoresistive cantilever with ultra-high acoustic compliance is used as the sensing element in the proposed pressure sensor. We achieved a can...

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Detalles Bibliográficos
Autores principales: Okamoto, Yuki, Nguyen, Thanh-Vinh, Takahashi, Hidetoshi, Takei, Yusuke, Okada, Hironao, Ichiki, Masaaki
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10119305/
https://www.ncbi.nlm.nih.gov/pubmed/37081122
http://dx.doi.org/10.1038/s41598-023-33568-3

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10119305/
https://www.ncbi.nlm.nih.gov/pubmed/37081122
http://dx.doi.org/10.1038/s41598-023-33568-3

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