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Highly sensitive low-frequency-detectable acoustic sensor using a piezoresistive cantilever for health monitoring applications
This study investigates a cantilever-based pressure sensor that can achieve a resolution of approximately 0.2 mPa, over the frequency range of 0.1–250 Hz. A piezoresistive cantilever with ultra-high acoustic compliance is used as the sensing element in the proposed pressure sensor. We achieved a can...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10119305/ https://www.ncbi.nlm.nih.gov/pubmed/37081122 http://dx.doi.org/10.1038/s41598-023-33568-3 |