Human–machine collaboration for improving semiconductor process development

One of the bottlenecks to building semiconductor chips is the increasing cost required to develop chemical plasma processes that form the transistors and memory storage cells(1,2). These processes are still developed manually using highly trained engineers searching for a combination of tool paramet...

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Detalles Bibliográficos
Autores principales: Kanarik, Keren J., Osowiecki, Wojciech T., Lu, Yu (Joe), Talukder, Dipongkar, Roschewsky, Niklas, Park, Sae Na, Kamon, Mattan, Fried, David M., Gottscho, Richard A.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10132970/
https://www.ncbi.nlm.nih.gov/pubmed/36890235
http://dx.doi.org/10.1038/s41586-023-05773-7

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10132970/
https://www.ncbi.nlm.nih.gov/pubmed/36890235
http://dx.doi.org/10.1038/s41586-023-05773-7

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