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Human–machine collaboration for improving semiconductor process development
One of the bottlenecks to building semiconductor chips is the increasing cost required to develop chemical plasma processes that form the transistors and memory storage cells(1,2). These processes are still developed manually using highly trained engineers searching for a combination of tool paramet...
| Autores principales: | , , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10132970/ https://www.ncbi.nlm.nih.gov/pubmed/36890235 http://dx.doi.org/10.1038/s41586-023-05773-7 |