Molecule Clustering Dynamics in the Molecular Doping Process of Si(111) with Diethyl-propyl-phosphonate

The molecular doping (MD) process is based on the deposition of dopant-containing molecules over the surface of a semiconductor substrate, followed by the thermal diffusion step. Previous studies suggest that, during the deposition, the molecules nucleate clusters, and at prolonged deposition times,...

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Detalles Bibliográficos
Autores principales: Pizzone, Mattia, Grimaldi, Maria Grazia, La Magna, Antonino, Scalese, Silvia, Adam, Jost, Puglisi, Rosaria A.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10138297/
https://www.ncbi.nlm.nih.gov/pubmed/37108041
http://dx.doi.org/10.3390/ijms24086877

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10138297/
https://www.ncbi.nlm.nih.gov/pubmed/37108041
http://dx.doi.org/10.3390/ijms24086877

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