Experimental Investigation of Tip Wear of AFM Monocrystalline Silicon Probes

AFM has a wide range of applications in nanostructure scanning imaging and fabrication. The wear of AFM probes has a significant impact on the accuracy of nanostructure measurement and fabrication, which is particularly significant in the process of nanomachining. Therefore, this paper focuses on th...

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Detalles Bibliográficos
Autores principales: Huang, Song, Tian, Yanling, Wang, Tao
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10141055/
https://www.ncbi.nlm.nih.gov/pubmed/37112426
http://dx.doi.org/10.3390/s23084084

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10141055/
https://www.ncbi.nlm.nih.gov/pubmed/37112426
http://dx.doi.org/10.3390/s23084084

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