On the Quenching of Electron Temperature in Inductively Coupled Plasma

Electron temperature has attracted great attention in plasma processing, as it dominates the production of chemical species and energetic ions that impact the processing. Despite having been studied for several decades, the mechanism behind the quenching of electron temperature with increasing disch...

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Detalles Bibliográficos
Autores principales: Seong, Inho, Kim, Si-jun, Lee, Youngseok, Cho, Chulhee, Jeong, Wonnyoung, You, Yebin, Choi, Minsu, Choi, Byeongyeop, You, Shinjae
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10141103/
https://www.ncbi.nlm.nih.gov/pubmed/37110054
http://dx.doi.org/10.3390/ma16083219

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10141103/
https://www.ncbi.nlm.nih.gov/pubmed/37110054
http://dx.doi.org/10.3390/ma16083219

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