Dependence of Monocrystalline Sapphire Dicing on Crystal Orientation Using Picosecond Laser Bessel Beams

Dicing is a critical step in the manufacturing process for the application of sapphire. In this work, the dependence of sapphire dicing on crystal orientation using picosecond Bessel laser beam drilling combined with mechanical cleavage was studied. By using the above method, linear cleaving with on...

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Detalles Bibliográficos
Autores principales: Wen, Qiuling, Chen, Jinhong, Huang, Guoqin, Cui, Changcai, Mu, Dekui
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10141367/
https://www.ncbi.nlm.nih.gov/pubmed/37421005
http://dx.doi.org/10.3390/mi14040772

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10141367/
https://www.ncbi.nlm.nih.gov/pubmed/37421005
http://dx.doi.org/10.3390/mi14040772

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