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Dependence of Monocrystalline Sapphire Dicing on Crystal Orientation Using Picosecond Laser Bessel Beams
Dicing is a critical step in the manufacturing process for the application of sapphire. In this work, the dependence of sapphire dicing on crystal orientation using picosecond Bessel laser beam drilling combined with mechanical cleavage was studied. By using the above method, linear cleaving with on...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10141367/ https://www.ncbi.nlm.nih.gov/pubmed/37421005 http://dx.doi.org/10.3390/mi14040772 |