Research on a Method to Improve the Temperature Performance of an All-Silicon Accelerometer

This paper presents a novel method for the performance of an all-silicon accelerometer by adjusting the ratio of the Si-SiO(2) bonding area, and the Au-Si bonding area in the anchor zone, with the aim of eliminating stress in the anchor region. The study includes the development of an accelerometer...

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Detalles Bibliográficos
Autores principales: Liu, Guowen, Liu, Yu, Ma, Xiao, Wang, Xuefeng, Zheng, Xudong, Jin, Zhonghe
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10141389/
https://www.ncbi.nlm.nih.gov/pubmed/37421102
http://dx.doi.org/10.3390/mi14040869

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10141389/
https://www.ncbi.nlm.nih.gov/pubmed/37421102
http://dx.doi.org/10.3390/mi14040869

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