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Research on a Method to Improve the Temperature Performance of an All-Silicon Accelerometer
This paper presents a novel method for the performance of an all-silicon accelerometer by adjusting the ratio of the Si-SiO(2) bonding area, and the Au-Si bonding area in the anchor zone, with the aim of eliminating stress in the anchor region. The study includes the development of an accelerometer...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10141389/ https://www.ncbi.nlm.nih.gov/pubmed/37421102 http://dx.doi.org/10.3390/mi14040869 |