Inductively Coupled Plasma Dry Etching of Silicon Deep Trenches with Extremely Vertical Smooth Sidewalls Used in Micro-Optical Gyroscopes

Micro-optical gyroscopes (MOGs) place a range of components of the fiber-optic gyroscope (FOG) onto a silicon substrate, enabling miniaturization, low cost, and batch processing. MOGs require high-precision waveguide trenches fabricated on silicon instead of the ultra-long interference ring of conve...

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Detalles Bibliográficos
Autores principales: Zhang, Yuyu, Wu, Yu, Sun, Quanquan, Shen, Lifeng, Lan, Jie, Guo, Lingxi, Shen, Zhenfeng, Wang, Xuefang, Xiao, Junfeng, Xu, Jianfeng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10141639/
https://www.ncbi.nlm.nih.gov/pubmed/37421079
http://dx.doi.org/10.3390/mi14040846

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10141639/
https://www.ncbi.nlm.nih.gov/pubmed/37421079
http://dx.doi.org/10.3390/mi14040846

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