Impact of Pulse Parameters of a DC Power Generator on the Microstructural and Mechanical Properties of Sputtered AlN Film with In-Situ OES Data Analysis

In the present study, the sputtered aluminum nitride (AlN) films were processed in a reactive pulsed DC magnetron system. We applied a total of 15 different design of experiments (DOEs) on DC pulsed parameters (reverse voltage, pulse frequency, and duty cycle) with Box–Behnken experimental method an...

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Detalles Bibliográficos
Autores principales: Zhou, Wei-Yu, Chen, Hsuan-Fan, Tseng, Xue-Li, Lo, Hsiao-Han, Wang, Peter J., Jiang, Ming-Yu, Fuh, Yiin-Kuen, Li, Tomi T.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10142377/
https://www.ncbi.nlm.nih.gov/pubmed/37109853
http://dx.doi.org/10.3390/ma16083015

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10142377/
https://www.ncbi.nlm.nih.gov/pubmed/37109853
http://dx.doi.org/10.3390/ma16083015

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