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Multi-Technique Approach for Work Function Exploration of Sc(2)O(3) Thin Films
Thin films based on scandium oxide (Sc(2)O(3)) were deposited on silicon substrates to investigate the thickness effect on the reduction of work function. X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), energy dispersive X-ray reflectivity (EDXR), atomic force microscopy (AFM), and...
Autores principales: | , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10142770/ https://www.ncbi.nlm.nih.gov/pubmed/37111015 http://dx.doi.org/10.3390/nano13081430 |