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Multi-Technique Approach for Work Function Exploration of Sc(2)O(3) Thin Films

Thin films based on scandium oxide (Sc(2)O(3)) were deposited on silicon substrates to investigate the thickness effect on the reduction of work function. X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), energy dispersive X-ray reflectivity (EDXR), atomic force microscopy (AFM), and...

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Detalles Bibliográficos
Autores principales:	Mezzi, Alessio, Bolli, Eleonora, Kaciulis, Saulius, Bellucci, Alessandro, Paci, Barbara, Generosi, Amanda, Mastellone, Matteo, Serpente, Valerio, Trucchi, Daniele Maria
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10142770/ https://www.ncbi.nlm.nih.gov/pubmed/37111015 http://dx.doi.org/10.3390/nano13081430

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