A GHz Silicon-Based Width Extensional Mode MEMS Resonator with Q over 10,000

This work presents a silicon-based capacitively transduced width extensional mode (WEM) MEMS rectangular plate resonator with quality factor (Q) of over 10,000 at a frequency of greater than 1 GHz. The Q value, determined by various loss mechanisms, was analyzed and quantified via numerical calculat...

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Detalles Bibliográficos
Autores principales: Liu, Wenli, Lu, Yujie, Chen, Zeji, Jia, Qianqian, Zhao, Junyuan, Niu, Bo, Wang, Wei, Hao, Yalu, Zhu, Yinfang, Yang, Jinling, Yang, Fuhua
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10143676/
https://www.ncbi.nlm.nih.gov/pubmed/37112146
http://dx.doi.org/10.3390/s23083808

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10143676/
https://www.ncbi.nlm.nih.gov/pubmed/37112146
http://dx.doi.org/10.3390/s23083808

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