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A Closed Cavity Ultrasonic Resonator Formed by Graphene/PMMA Membrane for Acoustic Application
A graphene/poly(methyl methacrylate) (PMMA) closed cavity resonator with a resonant frequency at around 160 kHz has been fabricated. A six-layer graphene structure with a 450 nm PMMA laminated layer has been dry-transferred onto the closed cavity with an air gap of 105 [Formula: see text] m. The res...
Autores principales: | , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10143713/ https://www.ncbi.nlm.nih.gov/pubmed/37421043 http://dx.doi.org/10.3390/mi14040810 |