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A Closed Cavity Ultrasonic Resonator Formed by Graphene/PMMA Membrane for Acoustic Application

A graphene/poly(methyl methacrylate) (PMMA) closed cavity resonator with a resonant frequency at around 160 kHz has been fabricated. A six-layer graphene structure with a 450 nm PMMA laminated layer has been dry-transferred onto the closed cavity with an air gap of 105 [Formula: see text] m. The res...

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Detalles Bibliográficos
Autores principales: Xu, Jing, Wood, Graham S., Mastropaolo, Enrico, Lomax, Peter, Newton, Michael, Cheung, Rebecca
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10143713/
https://www.ncbi.nlm.nih.gov/pubmed/37421043
http://dx.doi.org/10.3390/mi14040810