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A Closed Cavity Ultrasonic Resonator Formed by Graphene/PMMA Membrane for Acoustic Application

A graphene/poly(methyl methacrylate) (PMMA) closed cavity resonator with a resonant frequency at around 160 kHz has been fabricated. A six-layer graphene structure with a 450 nm PMMA laminated layer has been dry-transferred onto the closed cavity with an air gap of 105 [Formula: see text] m. The res...

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Autores principales: Xu, Jing, Wood, Graham S., Mastropaolo, Enrico, Lomax, Peter, Newton, Michael, Cheung, Rebecca
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10143713/
https://www.ncbi.nlm.nih.gov/pubmed/37421043
http://dx.doi.org/10.3390/mi14040810
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author Xu, Jing
Wood, Graham S.
Mastropaolo, Enrico
Lomax, Peter
Newton, Michael
Cheung, Rebecca
author_facet Xu, Jing
Wood, Graham S.
Mastropaolo, Enrico
Lomax, Peter
Newton, Michael
Cheung, Rebecca
author_sort Xu, Jing
collection PubMed
description A graphene/poly(methyl methacrylate) (PMMA) closed cavity resonator with a resonant frequency at around 160 kHz has been fabricated. A six-layer graphene structure with a 450 nm PMMA laminated layer has been dry-transferred onto the closed cavity with an air gap of 105 [Formula: see text] m. The resonator has been actuated in an atmosphere and at room temperature by mechanical, electrostatic and electro-thermal methods. The (1,1) mode has been observed to dominate the resonance, which suggests that the graphene/PMMA membrane has been perfectly clamped and seals the closed cavity. The degree of linearity of the membrane’s displacement versus the actuation signal has been determined. The resonant frequency has been observed to be tuned to around 4% by applying an AC voltage through the membrane. The strain has been estimated to be around 0.08%. This research puts forward a graphene-based sensor design for acoustic sensing.
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spelling pubmed-101437132023-04-29 A Closed Cavity Ultrasonic Resonator Formed by Graphene/PMMA Membrane for Acoustic Application Xu, Jing Wood, Graham S. Mastropaolo, Enrico Lomax, Peter Newton, Michael Cheung, Rebecca Micromachines (Basel) Article A graphene/poly(methyl methacrylate) (PMMA) closed cavity resonator with a resonant frequency at around 160 kHz has been fabricated. A six-layer graphene structure with a 450 nm PMMA laminated layer has been dry-transferred onto the closed cavity with an air gap of 105 [Formula: see text] m. The resonator has been actuated in an atmosphere and at room temperature by mechanical, electrostatic and electro-thermal methods. The (1,1) mode has been observed to dominate the resonance, which suggests that the graphene/PMMA membrane has been perfectly clamped and seals the closed cavity. The degree of linearity of the membrane’s displacement versus the actuation signal has been determined. The resonant frequency has been observed to be tuned to around 4% by applying an AC voltage through the membrane. The strain has been estimated to be around 0.08%. This research puts forward a graphene-based sensor design for acoustic sensing. MDPI 2023-04-01 /pmc/articles/PMC10143713/ /pubmed/37421043 http://dx.doi.org/10.3390/mi14040810 Text en © 2023 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Xu, Jing
Wood, Graham S.
Mastropaolo, Enrico
Lomax, Peter
Newton, Michael
Cheung, Rebecca
A Closed Cavity Ultrasonic Resonator Formed by Graphene/PMMA Membrane for Acoustic Application
title A Closed Cavity Ultrasonic Resonator Formed by Graphene/PMMA Membrane for Acoustic Application
title_full A Closed Cavity Ultrasonic Resonator Formed by Graphene/PMMA Membrane for Acoustic Application
title_fullStr A Closed Cavity Ultrasonic Resonator Formed by Graphene/PMMA Membrane for Acoustic Application
title_full_unstemmed A Closed Cavity Ultrasonic Resonator Formed by Graphene/PMMA Membrane for Acoustic Application
title_short A Closed Cavity Ultrasonic Resonator Formed by Graphene/PMMA Membrane for Acoustic Application
title_sort closed cavity ultrasonic resonator formed by graphene/pmma membrane for acoustic application
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10143713/
https://www.ncbi.nlm.nih.gov/pubmed/37421043
http://dx.doi.org/10.3390/mi14040810
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