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A Closed Cavity Ultrasonic Resonator Formed by Graphene/PMMA Membrane for Acoustic Application
A graphene/poly(methyl methacrylate) (PMMA) closed cavity resonator with a resonant frequency at around 160 kHz has been fabricated. A six-layer graphene structure with a 450 nm PMMA laminated layer has been dry-transferred onto the closed cavity with an air gap of 105 [Formula: see text] m. The res...
Autores principales: | , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10143713/ https://www.ncbi.nlm.nih.gov/pubmed/37421043 http://dx.doi.org/10.3390/mi14040810 |
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author | Xu, Jing Wood, Graham S. Mastropaolo, Enrico Lomax, Peter Newton, Michael Cheung, Rebecca |
author_facet | Xu, Jing Wood, Graham S. Mastropaolo, Enrico Lomax, Peter Newton, Michael Cheung, Rebecca |
author_sort | Xu, Jing |
collection | PubMed |
description | A graphene/poly(methyl methacrylate) (PMMA) closed cavity resonator with a resonant frequency at around 160 kHz has been fabricated. A six-layer graphene structure with a 450 nm PMMA laminated layer has been dry-transferred onto the closed cavity with an air gap of 105 [Formula: see text] m. The resonator has been actuated in an atmosphere and at room temperature by mechanical, electrostatic and electro-thermal methods. The (1,1) mode has been observed to dominate the resonance, which suggests that the graphene/PMMA membrane has been perfectly clamped and seals the closed cavity. The degree of linearity of the membrane’s displacement versus the actuation signal has been determined. The resonant frequency has been observed to be tuned to around 4% by applying an AC voltage through the membrane. The strain has been estimated to be around 0.08%. This research puts forward a graphene-based sensor design for acoustic sensing. |
format | Online Article Text |
id | pubmed-10143713 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2023 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-101437132023-04-29 A Closed Cavity Ultrasonic Resonator Formed by Graphene/PMMA Membrane for Acoustic Application Xu, Jing Wood, Graham S. Mastropaolo, Enrico Lomax, Peter Newton, Michael Cheung, Rebecca Micromachines (Basel) Article A graphene/poly(methyl methacrylate) (PMMA) closed cavity resonator with a resonant frequency at around 160 kHz has been fabricated. A six-layer graphene structure with a 450 nm PMMA laminated layer has been dry-transferred onto the closed cavity with an air gap of 105 [Formula: see text] m. The resonator has been actuated in an atmosphere and at room temperature by mechanical, electrostatic and electro-thermal methods. The (1,1) mode has been observed to dominate the resonance, which suggests that the graphene/PMMA membrane has been perfectly clamped and seals the closed cavity. The degree of linearity of the membrane’s displacement versus the actuation signal has been determined. The resonant frequency has been observed to be tuned to around 4% by applying an AC voltage through the membrane. The strain has been estimated to be around 0.08%. This research puts forward a graphene-based sensor design for acoustic sensing. MDPI 2023-04-01 /pmc/articles/PMC10143713/ /pubmed/37421043 http://dx.doi.org/10.3390/mi14040810 Text en © 2023 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Xu, Jing Wood, Graham S. Mastropaolo, Enrico Lomax, Peter Newton, Michael Cheung, Rebecca A Closed Cavity Ultrasonic Resonator Formed by Graphene/PMMA Membrane for Acoustic Application |
title | A Closed Cavity Ultrasonic Resonator Formed by Graphene/PMMA Membrane for Acoustic Application |
title_full | A Closed Cavity Ultrasonic Resonator Formed by Graphene/PMMA Membrane for Acoustic Application |
title_fullStr | A Closed Cavity Ultrasonic Resonator Formed by Graphene/PMMA Membrane for Acoustic Application |
title_full_unstemmed | A Closed Cavity Ultrasonic Resonator Formed by Graphene/PMMA Membrane for Acoustic Application |
title_short | A Closed Cavity Ultrasonic Resonator Formed by Graphene/PMMA Membrane for Acoustic Application |
title_sort | closed cavity ultrasonic resonator formed by graphene/pmma membrane for acoustic application |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10143713/ https://www.ncbi.nlm.nih.gov/pubmed/37421043 http://dx.doi.org/10.3390/mi14040810 |
work_keys_str_mv | AT xujing aclosedcavityultrasonicresonatorformedbygraphenepmmamembraneforacousticapplication AT woodgrahams aclosedcavityultrasonicresonatorformedbygraphenepmmamembraneforacousticapplication AT mastropaoloenrico aclosedcavityultrasonicresonatorformedbygraphenepmmamembraneforacousticapplication AT lomaxpeter aclosedcavityultrasonicresonatorformedbygraphenepmmamembraneforacousticapplication AT newtonmichael aclosedcavityultrasonicresonatorformedbygraphenepmmamembraneforacousticapplication AT cheungrebecca aclosedcavityultrasonicresonatorformedbygraphenepmmamembraneforacousticapplication AT xujing closedcavityultrasonicresonatorformedbygraphenepmmamembraneforacousticapplication AT woodgrahams closedcavityultrasonicresonatorformedbygraphenepmmamembraneforacousticapplication AT mastropaoloenrico closedcavityultrasonicresonatorformedbygraphenepmmamembraneforacousticapplication AT lomaxpeter closedcavityultrasonicresonatorformedbygraphenepmmamembraneforacousticapplication AT newtonmichael closedcavityultrasonicresonatorformedbygraphenepmmamembraneforacousticapplication AT cheungrebecca closedcavityultrasonicresonatorformedbygraphenepmmamembraneforacousticapplication |