Improving the Thickness Uniformity of Micro Gear by Multi-Step, Self-Aligned Lithography and Electroforming

The thickness nonuniformity of an electroformed layer is a bottleneck problem for electroformed micro metal devices. In this paper, a new fabrication method is proposed to improve the thickness uniformity of micro gear, which is the key element of various microdevices. The effect of the thickness of...

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Detalles Bibliográficos
Autores principales: Wang, Huan, Xie, Jing, Fan, Tao, Sun, Dapeng, Li, Chaobo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10144376/
https://www.ncbi.nlm.nih.gov/pubmed/37421007
http://dx.doi.org/10.3390/mi14040775

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10144376/
https://www.ncbi.nlm.nih.gov/pubmed/37421007
http://dx.doi.org/10.3390/mi14040775

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