Development and Research of the Sensitive Element of the MEMS Gyroscope Manufactured Using SOI Technology

In this article, based on the developed methodology, the stages of designing the sensitive element of a microelectromechanical gyroscope with an open-loop structure are considered. This structure is intended for use in control units for mobile objects such as robots, mobile trolleys, etc. To quickly...

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Detalles Bibliográficos
Autores principales: Naumenko, Danil, Tkachenko, Alexey, Lysenko, Igor, Kovalev, Andrey
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10145042/
https://www.ncbi.nlm.nih.gov/pubmed/37421128
http://dx.doi.org/10.3390/mi14040895

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10145042/
https://www.ncbi.nlm.nih.gov/pubmed/37421128
http://dx.doi.org/10.3390/mi14040895

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