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Development and Research of the Sensitive Element of the MEMS Gyroscope Manufactured Using SOI Technology
In this article, based on the developed methodology, the stages of designing the sensitive element of a microelectromechanical gyroscope with an open-loop structure are considered. This structure is intended for use in control units for mobile objects such as robots, mobile trolleys, etc. To quickly...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10145042/ https://www.ncbi.nlm.nih.gov/pubmed/37421128 http://dx.doi.org/10.3390/mi14040895 |