An Optical Measuring Transducer for a Micro-Opto-Electro-Mechanical Micro-g Accelerometer Based on the Optical Tunneling Effect

Micro-opto-electro-mechanical (MOEM) accelerometers that can measure small accelerations are attracting growing attention thanks to their considerable advantages—such as high sensitivity and immunity to electromagnetic noise—over their rivals. In this treatise, we analyze 12 schemes of MOEM-accelero...

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Detalles Bibliográficos
Autores principales: Barbin, Evgenii, Nesterenko, Tamara, Koleda, Aleksei, Shesterikov, Evgeniy, Kulinich, Ivan, Kokolov, Andrey
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10145734/
https://www.ncbi.nlm.nih.gov/pubmed/37421036
http://dx.doi.org/10.3390/mi14040802

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10145734/
https://www.ncbi.nlm.nih.gov/pubmed/37421036
http://dx.doi.org/10.3390/mi14040802

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