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An Optical Measuring Transducer for a Micro-Opto-Electro-Mechanical Micro-g Accelerometer Based on the Optical Tunneling Effect
Micro-opto-electro-mechanical (MOEM) accelerometers that can measure small accelerations are attracting growing attention thanks to their considerable advantages—such as high sensitivity and immunity to electromagnetic noise—over their rivals. In this treatise, we analyze 12 schemes of MOEM-accelero...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10145734/ https://www.ncbi.nlm.nih.gov/pubmed/37421036 http://dx.doi.org/10.3390/mi14040802 |