Recent Trends in Structures and Interfaces of MEMS Transducers for Audio Applications: A Review

In recent years, Micro-Electro-Mechanical Systems (MEMS) technology has had an impressive impact in the field of acoustic transducers, allowing the development of smart, low-cost, and compact audio systems that are employed in a wide variety of highly topical applications (consumer devices, medical...

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Detalles Bibliográficos
Autores principales: Gemelli, Alessandro, Tambussi, Marco, Fusetto, Samuele, Aprile, Antonio, Moisello, Elisabetta, Bonizzoni, Edoardo, Malcovati, Piero
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Review
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10146864/
https://www.ncbi.nlm.nih.gov/pubmed/37421080
http://dx.doi.org/10.3390/mi14040847

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10146864/
https://www.ncbi.nlm.nih.gov/pubmed/37421080
http://dx.doi.org/10.3390/mi14040847

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