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Recent Trends in Structures and Interfaces of MEMS Transducers for Audio Applications: A Review
In recent years, Micro-Electro-Mechanical Systems (MEMS) technology has had an impressive impact in the field of acoustic transducers, allowing the development of smart, low-cost, and compact audio systems that are employed in a wide variety of highly topical applications (consumer devices, medical...
| Autores principales: | , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10146864/ https://www.ncbi.nlm.nih.gov/pubmed/37421080 http://dx.doi.org/10.3390/mi14040847 |