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Nanostructures Stacked on Hafnium Oxide Films Interfacing Graphene and Silicon Oxide Layers as Resistive Switching Media
SiO(2) films were grown to thicknesses below 15 nm by ozone-assisted atomic layer deposition. The graphene was a chemical vapor deposited on copper foil and transferred wet-chemically to the SiO(2) films. On the top of the graphene layer, either continuous HfO(2) or SiO(2) films were grown by plasma...
Autores principales: | , , , , , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10146930/ https://www.ncbi.nlm.nih.gov/pubmed/37110908 http://dx.doi.org/10.3390/nano13081323 |