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Gas-assisted femtosecond pulsed laser machining: A high-throughput alternative to focused ion beam for creating large, high-resolution cross sections
Cross sectioning is a critical sample preparation technique used in a wide range of applications, that enables investigation of buried layers and subsurface features or defects. State-of-the-art cross-sectioning methods, each have their own pros and cons, but generally suffer from a tradeoff between...
Autores principales: | , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Public Library of Science
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10156015/ https://www.ncbi.nlm.nih.gov/pubmed/37134048 http://dx.doi.org/10.1371/journal.pone.0285158 |