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Gas-assisted femtosecond pulsed laser machining: A high-throughput alternative to focused ion beam for creating large, high-resolution cross sections

Cross sectioning is a critical sample preparation technique used in a wide range of applications, that enables investigation of buried layers and subsurface features or defects. State-of-the-art cross-sectioning methods, each have their own pros and cons, but generally suffer from a tradeoff between...

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Detalles Bibliográficos
Autores principales: May, Nicholas, Choi, Hongbin, Phoulady, Adrian, Amini, Shahram, Tavousi, Pouya, Shahbazmohamadi, Sina
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Public Library of Science 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10156015/
https://www.ncbi.nlm.nih.gov/pubmed/37134048
http://dx.doi.org/10.1371/journal.pone.0285158