Self-aligned single-electrode actuation of tangential and wineglass modes using PMN-PT

Considering the evolution of rotation sensing and timing applications realized in micro-electro-mechanical systems (MEMS), flexural mode resonant shapes are outperformed by bulk acoustic wave (BAW) counterparts by achieving higher frequencies with both electrostatic and piezoelectric transduction. W...

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Detalles Bibliográficos
Autores principales: Erturk, Ozan, Shambaugh, Kilian, Park, Ha-Seong, Lee, Sang-Goo, Bhave, Sunil A.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10160121/
https://www.ncbi.nlm.nih.gov/pubmed/37152864
http://dx.doi.org/10.1038/s41378-023-00521-3

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10160121/
https://www.ncbi.nlm.nih.gov/pubmed/37152864
http://dx.doi.org/10.1038/s41378-023-00521-3

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